High-Q Solenoidal Inductive Elements

A solenoid-like magnetic-storage element embedded in high-resistivity silicon is presented that maintains well-defined signal and signal return-paths. By not being focused on creating a lumped inductor equivalent, the design space is opened up. At 5 GHz an effective inductance of 1.9 nH with a Q of 30 increasing to a 10.6 nH inductance with a Q of 11 were achieved.

[1]  Michael B. Steer,et al.  Foundations of Interconnect and Microstrip Design , 2000 .

[2]  Jose E. Schutt-Aine,et al.  Development of three-dimensional inductors using plastic deformation magnetic assembly (PDMA) , 2003 .

[3]  Mark G. Allen,et al.  Surface micromachined solenoid inductors for high frequency applications , 1997 .

[4]  Hau-Yiu Tsui,et al.  An on-chip vertical solenoid inductor design for multigigahertz CMOS RFIC , 2005, IEEE Transactions on Microwave Theory and Techniques.

[5]  Ken-Huang Lin,et al.  Design of solenoid inductors with high operating frequency for RF integrated circuits , 2005, 2005 Asia-Pacific Microwave Conference Proceedings.

[6]  L.P.B. Katehi,et al.  Toroidal inductors for radio-frequency integrated circuits , 2004, IEEE Transactions on Microwave Theory and Techniques.

[7]  M. Ellis,et al.  Microassembled tunable MEMS inductor , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[8]  Jun-Bo Yoon,et al.  Surface micromachined solenoid on-Si and on-glass inductors for RF applications , 1999, IEEE Electron Device Letters.

[9]  E. Yoon,et al.  Surface micromachined solenoid on-Si and on-glass inductors for RF applications , 1999 .

[10]  M. B. Steer,et al.  Foundations of Interconnect and Microstrip Design: Edwards/Foundations of Interconnect and Microstrip Design , 2000 .

[11]  Hong Lu,et al.  Micromachined on-chip high-aspect ratio air core solenoid inductor for multi-GHz applications , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).