论文信息 - In-Line Electrical Metrology for High-K Gate Dielectrics Deposited by Atomic Layer CVD - 字舞流文

In-Line Electrical Metrology for High-K Gate Dielectrics Deposited by Atomic Layer CVD

M. Heyns | E. Young | W. Besling | Z. Rittersma | K. Eason | H. Witte | J. Maes | S. Passefort