Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching
暂无分享,去创建一个
[1] S. Miyake,et al. Fabrication of Silicon Utilizing Mechanochemical Local Oxidation by Diamond Tip Sliding , 2001 .
[2] Bruce C Wheeler,et al. A modified microstamping technique enhances polylysine transfer and neuronal cell patterning. , 2003, Biomaterials.
[3] Stephen Y. Chou,et al. Imprint of sub-25 nm vias and trenches in polymers , 1995 .
[4] J.C.M. Li,et al. Scratch test of soda-lime glass , 1998 .
[5] D. Hülsenberg. Glasses for microsystems technology , 1997 .
[6] Chung-Jen Lu,et al. The effect of tip radius on nano-indentation hardness tests , 1995 .
[7] Yoshitaro Yoshida,et al. Study on Nano-machining Process Using Mechanism of a Friction Force Microscope , 2001 .
[8] H. Andersson,et al. Microfluidic devices for cellomics: a review , 2003 .
[9] S. Miyake,et al. Increase and Decrease of Etching Rate of Silicon due to Diamond Tip Sliding by Changing Scanning Density , 2002 .
[10] M. Dragoman,et al. Micro/nano-optoeletromechanical systems , 2001 .
[11] M.-A. Grétillat,et al. A New Fabrication Method for Borosilicate Glass Capillary Tubes with Lateral Inlets and Outlets , 1997 .
[12] Stephen Y. Chou,et al. Imprint lithography with sub-10 nm feature size and high throughput , 1997 .
[13] S. Youn,et al. Maskless pattern fabrication on Si(100) surface by using nanoindenter with KOH wet etching , 2004 .