Simulation of Piezoelectric Dome-Shaped-Diaphragm Acoustic Transducers

This paper describes the simulation of a micromachined dome-shaped-diaphragm acoustic transducer built on a 1.5 µm thick silicon nitride diaphragm (2,000 µm in radius, with a circular clamped boundary on a silicon substrate) with electrodes and piezoelectric ZnO film in a silicon substrate. Finite element analysis with ANSYS 5.6 has been performed to analyze the static and dynamic behaviors of the transducer under both pressure and voltage loadings.

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