论文信息 - Structural influences on the laser damage resistance of optical oxide coatings for use at 1064 nm

Structural influences on the laser damage resistance of optical oxide coatings for use at 1064 nm

Abstract Optical coatings of titania (TiO 2 ) and tantala (Ta 2 O 5 ) prepared by reactive r.f. diode and d.c. plasmatron sputtering were investigated for the influence of structural properties on the 1064 nm laser damage resistance. Using various methods of characterizing the compositional, crystallographic, microstructural and optical properties, it was found that the damage thresholds are directly related to the content of oxygen in the films in excess of the stoichiometric value, whereas grain sizes and refractive indices show no systematic influences valid for both oxide materials. The highest oxygen-to-metal atomic ratios and thus the highest damage thresholds were achieved by the use of r.f. diode sputtering. X-ray photo spectroscopy investigations of tantala coatings with different oxygen-to-tantalum atomic ratios up to 2.75 revealed for both constituents of the oxide only binding energies representative for tantalum pentoxide.

[1] D Milam,et al. Influence of deposition parameters on laser-damage threshold of silica-tantala AR coatings. , 1982, Applied optics.

[2] Roger M. Wood,et al. Laser damage in optical materials , 1986 .

[3] Eberhard Welsch,et al. Measurement of optical losses and damage thresholds of multilayer coatings , 1984 .

[4] A. D. Romig,et al. Microbeam Analysis 1984 , 1984 .

[5] S. Schiller,et al. Use of the ring gap plasmatron for high rate sputtering , 1977 .

[6] S. Schiller,et al. Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode , 1984 .

[7] Ea Teppo,et al. Temporary laser damage threshold enhancement by laser conditioning of antireflection‐coated glass , 1987 .

[8] T. A. Wiggins,et al. Observation and morphology of small-scale laser induced damage. , 1982, Applied optics.

[9] E. Welsch,et al. Absorption-influenced Laser Damage Resistance of Ta2O5 Coatings , 1986 .

[10] H. Walther,et al. Measurement of the extinction of sputtered TiO2 films , 1982 .

[11] T. Yabe,et al. Mechanism of damage formation in antireflection coatings , 1986 .

[12] S. Schiller,et al. Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive d.c. plasmatron sputtering , 1981 .