Highly reliable SiO/sub 2//Si/sub 3/N/sub 4/ stacked dielectric on rapid-thermal-nitrided rugged polysilicon for high-density DRAM's
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G. Lo | D. Kwong | P. Fazan | S. Ito | D.-L. Kwong | G.Q. Lo | S. Ito | V.K. Mathews | P.C. Fazan | V. K. Mathews
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