Control of Electron Density and Rotation Profiles by Voltage Biased Electrodes in RF Produced Plasma
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Using voltage biasing to ten concentric rings, profiles of plasma density and high azimuthal rotation velocity in a supersonic regime were controlled under three magnetic field configurations in a cylindrical magnetized RF produced plasma. Low frequency (< 4 kHz) density oscillation was identified as a drift wave type: propagation in the electron diamagnetic direction, which is opposite to the edge plasma rotation.
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