Simulations for Surface Evolvement and Footing Effect in ICP DRIE Fabrications

Simulations of surface evolvement are performed using an ICP DRIE model, in which a new method is adopted for the material identification. The simulation and experimental results are shown in this paper, which indicate that the veracity provided by this modified model is satisfied. The high-efficiency of this model over other former ones are due to the ability of identification of different material by uniform algorithm, and accordingly, it has much shorter executing time. Further more, an approximate model is presented to simulate the footing effect in DRIE fabrications, with the simulation results of the surface affected by footing effect in accordance to the experiments.