论文信息 - Compositional and electrical properties of SiO2/Si3N4/SiO2 stacked films grown onto silicon substrates and annealed in hydrogen - 字舞流文

Compositional and electrical properties of SiO2/Si3N4/SiO2 stacked films grown onto silicon substrates and annealed in hydrogen

P. Fiorani | L. Lozzi | S. Santucci | M. Passacantando | S. Santucci | L. Ottaviano | R. Alfonsetti | P. Picozzi | G. Moccia | A. D. Giacomo