Perforated Plates of Inertial Sensors – Modeling by Effective Material Properties☆

Abstract In this paper a method for the modeling of flexible perforated plates by continuous ones is presented using the example of an accelerometer. This model order reduction (MOR) by effective material properties enables the accurate simulation of out-of- plane modes needed for drop tests e.g. based on the system level design tool MEMS+ library building blocks.

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