Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3×3 interferometer.

[2]  Photonic pressure sensor in silicon on insulator , 2009, CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference.

[3]  A..  Universal relations for coupling of optical power between microresonators and dielectric waveguides , 2004 .

[4]  Photoelastic Effect in Silicon Ring Resonators , 2008 .

[5]  D. Van Thourhout,et al.  Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[6]  R. Baets,et al.  A thin foil optical strain gage based on silicon-on-insulator microresonators , 2007, European Workshop on Optical Fibre Sensors.

[7]  G. Roelkens,et al.  Thin-Film III-V Photodetectors Integrated on Silicon-on-Insulator Photonic ICs , 2007, Journal of Lightwave Technology.