论文信息 - 10.2 A 22ng/√Hz 17mW MEMS Accelerometer with Digital Noise-Reduction Techniques

10.2 A 22ng/√Hz 17mW MEMS Accelerometer with Digital Noise-Reduction Techniques

In emerging applications such as next-generation oil and gas exploration and infrastructure monitoring, a large number of highly sensitive accelerometers need to be deployed. The fully integrated MEMS accelerometer in this work achieves both the extremely low noise level (22ng$/ \surd $Hz) required by these applications and sufficiently low power (17mW) enabling battery-based operations while meeting the required input range and bandwidth. Low noise is conventionally achieved either by the use of geophones, which have limited input bandwidth, or by the use of MEMS accelerometers, which dissipate much more power [1]. The highlights of this MEMS accelerometer are its MEMS structure with isolated detection and servo capacitors, noise reduction in the digital domain based on awareness of unfamiliar noise mechanisms and its low-noise high-voltage (HV) DACs.

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