Robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating
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Dominiek Reynaerts | Jan Peirs | Göran Stemme | Wouter van der Wijngaart | Henrik Gradin | G. Stemme | D. Reynaerts | J. Peirs | W. Wijngaart | Donato Clausi | H. Gradin | S. Braun | Donato Clausi | Stefan Braun
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