论文信息 - Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing - 字舞流文

Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing

V. V. Emtsev | V. Davydov | R. Job | A. Ulyashin | A. Mudryi | F. P. Korshunov | G. Oganesyan | T. Larionova | A. I. Patuk | I. A. Shakin | W. R. Fahrner