论文信息 - Cluster-free B-doped a-Si:H films deposited using SiH4 + B10H14 multi-hollow discharges - 字舞流文

Cluster-free B-doped a-Si:H films deposited using SiH4 + B10H14 multi-hollow discharges

K. Nakahara | D. Yamashita | K. Koga | M. Shiratani | N. Itagaki | G. Uchida | M. Sato | Y. Kawashima | T. Matsunaga | Hidefumi Matsuzaki | W. M. Nakamura | Kousuke Yamamoto