Pressure sensors merge micromachining and microelectronics

Abstract Sensing system requirements vary considerably from system to system and depend heavily upon the market segment and application: automotive versus industrial, manifold absolute pressure versus blood pressure. Both of these particular examples utilize micromachined silicon and have been the focus of several manufacturers' efforts for the past decade. The experience obtained from supplying these products in volume and working with customers to determine future sensing requirements is leading to new types of sensors and increased integration. This paper will present some of the problems that confront the development and manufacture of more complex silicon structures and integrated control circuits.