论文信息 - High quality AlN film grown on a nano-concave-circle patterned Si substrate with an AlN seed layer - 字舞流文

High quality AlN film grown on a nano-concave-circle patterned Si substrate with an AlN seed layer

W. Ge | Fujun Xu | N. Tang | B. Shen | Xuelin Yang | Xinqiang Wang | N. Xie | Jianfei Shen | Lai Wei | Danshuo Liu | Zidong Cai | F. Xu