Compact Squeezed-Film Damping Model for Perforated Surface
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[1] S. Fukui,et al. Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation: First Report—Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow , 1988 .
[2] J. B. Starr. Squeeze-film damping in solid-state accelerometers , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
[3] T. Veijola,et al. Equivalent-circuit model of the squeezed gas film in a silicon accelerometer , 1995 .
[4] T. Veijola,et al. Circuit Simulation Model Of Gas Damping In Microstructures With Nontrivial Geometries , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[5] Wouter Olthuis,et al. A silicon condenser microphone with polyimide diaphragm and backplate , 1997 .
[6] Felix Sharipov,et al. Data on Internal Rarefied Gas Flows , 1998 .
[7] A. Dec,et al. Micromachined electro-mechanically tunable capacitors and their applications to RF IC's , 1998 .
[8] A. Malczewski,et al. RF MEMs variable capacitors for tunable filters , 1999 .