论文信息 - Cubic boron nitride deposition on silicon substrates at room temperature by KrF excimer laser ablation of h-BN - 字舞流文

Cubic boron nitride deposition on silicon substrates at room temperature by KrF excimer laser ablation of h-BN

A. Luches | A. Zocco | A. Perrone | G. Speranza | N. Laidani | G. Leggieri | M. Anderle | S. Acquaviva