Mechanism of Cluster Formation in a Clean Silane Discharge

The mechanism of the formation of hydrogenated silicon clusters in a clean silane glow discharge is studied with elastic light scattering. The data are complemented by mass spectrometric measurements and theoretical modeling. In a clean discharge with a maximum oxygen and water content of <0,1 mole percent (m/o) the appearance of the clusters correlates with the formation of higher polysilanes. A possible mechanism of the cluster formation is suggested