Abstract This paper describes the design and performance of a directly-cooled soft X-ray mirror system which has been developed at Lawrence Berkeley Laboratory for synchrotron radiation beam lines in which mirror thermal distortion must be minimized for acceptable optical performance ∗ . Two similar mirror systems are being built: the first mirror has been installed and operated at the National Synchrotron Light Source on the X-17T miniundulator beam line and will be moved to the permanent X-1 beam line when a new, more powerful undulator is installed there. The second system is being built for installation at the Stanford Synchrotron Radiation Laboratory on Beam Line VI, where the total absorbed power on the mirror may be as high as 2400 W with a peak absorbed power density of 520 W/cm2. Direct cooling by convection is achieved using internal water channels in a brazed, dispersion-strengthened copper and OFHC copper substrate with a polished electroless-nickel surface. A simple kinematic linkage and flexural pivot mounting provide for mirror positioning about two rotational axes that coincide with the optical surface. Surface figure metrology, optical configurations, and tolerancing are also discussed.
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