论文信息 - Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

Hysteresis and multiple steady states have been observed in a low pressure inductively coupled plasma in chlorine gas. A bowl-shaped bright structure with sharply delineated edges (plasmoid) was found to form under the planar coil. A different plasma state with rather diffuse emission of lower intensity was also observed under the same operating conditions.

D. J. Economou | R. S. Wise | A. Kubota

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