论文信息 - Energy funnels - A new oxide breakdown model

Energy funnels - A new oxide breakdown model

Stress induced leakage current (SILC) and soft breakdown (SBD) are current hot topics[l,2] in thin gate-oxide reliability. We wish to report here some new experimental observations and to propose a new model for trap assisted tunneling (TAT), SBD and Hard breakdown (HBD).

Lai | Chang | Cheung | Colonell | Liu | Pai

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