RAPID COMMUNICATION: RAS - a new process control tool in liquid crystal device fabrication

Ion beam etching of surfaces has recently been shown to be an attractive liquid crystal alignment technique for use in the commercial fabrication of liquid crystal displays. Reflectivity and atomic force microscopy measurements suggest the alignment ability of an ion-etched surface is promoted by modifications at the atomic scale. Reflection anisotropy spectroscopy is demonstrated as a real time monitor of the etching process, promising a process control tool for the next generation of liquid crystal devices.