论文信息 - Effects of gas ring position and mesh introduction on film quality and thickness uniformity - 字舞流文

Effects of gas ring position and mesh introduction on film quality and thickness uniformity

Sang-Gyun Woo | Young-Bum Koh | Byeong-Soo Bae | Kwangsoo No | Eunah Kim | Seungbum Hong | Zhong-Tao Jiang | K. No | S. Woo | Seungbum Hong | B. Bae | Eunah Kim | Sung-Chul Lim | Zhong‐Tao Jiang | Sung-Chul Lim | Y. Koh

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