Thermodynamic Analysis of InxGa1-xN Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy

A thermodynamic analysis of alloy composition is described for metalorganic vapor phase epitaxy (MOVPE) of Inx Ga1-x N. The vapor-solid distribution relationship is discussed in comparison with the experimental data reported in the literature. It is shown that the solid composition of Inx Ga1-x N alloy grown by MOVPE is thermodynamically controlled. The origin of the deviation of the solid composition from the linear relation is also discussed.