The structural homogeneity of boron carbide thin films fabricated using plasma‐enhanced chemical vapor deposition from B5H9+CH4
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P. Dowben | Sunwoo Lee | T. A. Callcott | J. Mazurowski | D. Ederer | J. Jia | O'Brien Wl | Dong Qy | K. Miyano | Yexin Tan | Mueller Dr