Modeling and experimental characterization of an active MEMS based force sensor

Active force sensors are based on the principle of force balancing using a feedback control. They allow, unlike passive sensors, the measurement of forces in a wide range with nanoNewton resolutions. This capability is fundamental when dealing with the mechanical characterization of samples with a wide range of stiffness. This paper deals with the modeling and the experimental characterization of a new active MEMS based force sensor. This sensor includes folded-flexure type suspensions and a differential comb drive actuation allowing a linear force/voltage relationship. A control oriented electromechanical model is proposed and validated experimentally in static and dynamic operating modes using a stroboscopic measurement system. The sensor has a resonant frequency of 2.2 kHz, and a static passive measurement range of $\pm 2.45\mu \mathbf{N}$. This work is the first step toward new dynamic measuring capabilities and sensing at the micro/nano-scales when high dynamic, large measurement range and nanoNewton resolution are required.

[1]  Stéphane Régnier,et al.  Microrobotics for Micromanipulation. , 2010 .

[2]  Michael Curt Elwenspoek,et al.  Comb-drive actuators for large displacements , 1996 .

[3]  S. O. R. Moheimani,et al.  Feedback-Controlled MEMS Force Sensor for Characterization of Microcantilevers , 2015, Journal of Microelectromechanical Systems.

[4]  Bradley J. Nelson,et al.  Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot , 2008 .

[5]  Weihai Chen,et al.  A MEMS based sensor for large scale force measurement , 2013, 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[6]  Y. Haddab,et al.  Modeling and Optimal Force Control of a Nonlinear Electrostatic Microgripper , 2013, IEEE/ASME Transactions on Mechatronics.

[7]  S. O. Reza Moheimani,et al.  A Closed-loop MEMS force sensor with adjustable stiffness , 2017, 2017 IEEE Conference on Control Technology and Applications (CCTA).

[8]  I. Shimoyama,et al.  MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[9]  Brian J. Kim,et al.  An implantable all-Parylene liquid-impedance based MEMS force sensor , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[10]  Wen J. Li,et al.  An integrated MEMS three-dimensional tactile sensor with large force range , 2000 .

[11]  Pierre Courrieu,et al.  Fast Computation of Moore-Penrose Inverse Matrices , 2008, ArXiv.

[12]  Philippe Lutz,et al.  Gain Scheduling Control of a Nonlinear Electrostatic Microgripper: Design by an Eigenstructure Assignment With an Observer-Based Structure , 2015, IEEE Transactions on Control Systems Technology.

[13]  S. O. Reza Moheimani,et al.  Zero displacement microelectromechanical force sensor using feedback control , 2014 .

[14]  Xin Guo,et al.  A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET) , 2017, 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).

[15]  Yassine Haddab,et al.  An output feedback LPV control strategy of a nonlinear electrostatic microgripper through a singular implicit modeling , 2014 .

[16]  S. Koch,et al.  Micromachined piconewton force sensor for biophysics investigations , 2006 .