论文信息 - Method of fabrication of ISFET-based biosensors on an Si–SiO2–Si structure

Method of fabrication of ISFET-based biosensors on an Si–SiO2–Si structure

Abstract A new ISFET-based biosensors fabrication method, based on an Si–SiO 2 –Si structure is presented. The method was demonstrated by constructing glucose sensor and its performance was evaluated experimentally. The preliminary results of investigation of the behaviour of developed glucose sensor in human urine are presented. The proposed fabrication method can be applied to various BioFETs.

A. Poghossian | A. S. Poghossian

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