A method for measuring the guideway straightness error based on polarized interference principle

Abstract This paper presents a new method for measuring guideway straightness error based on the polarized interference principle and affords a new way to measure straightness error in real-time with high precision. Firstly, the method is demonstrated and analyzed in theory, and then the layout of the optical modulator and the polarization angle detecting unit are discussed in details. Finally, a calibration process is introduced with linear function based on the least-square method. Calibration results show that the correlation coefficients R2 of the fitting curves are above 0.9999 and the standard error of the estimated value is less than 0.2 μm. The theoretical analysis of the relationship between the straightness error and polarization angle is verified. The range of measuring straightness error is above 0.5 mm with 0.5 μm resolution. The system uncertainty (k=3) is less than 1 μm after the measurement system is calibrated. Experimental results demonstrate that this method possesses the advantages of minimizing the effects caused by the variation of light intensity and the shape and surface error of the guideway. The measurement accuracy is considerable with the autocollimator having the characteristic of high reliability and accuracy. It will have a prospective application in the industrial measurement field.

[1]  Wen-Yuh Jywe,et al.  A new 2D error separation technique for performance tests of CNC machine tools , 2007 .

[2]  Wei Gao,et al.  A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways , 2007 .

[3]  En Hong,et al.  A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques. , 2007, The Review of scientific instruments.

[4]  Harald Bosse,et al.  A method for the in situ determination of Abbe errors and their correction , 2007 .

[5]  J.R.R. Mayer,et al.  Relationships between straightness and angular kinematic errors in machines , 2007 .

[6]  Jose Mathew,et al.  A fast and simple algorithm for evaluation of minimum zone straightness error from coordinate data , 2007 .

[7]  W Knapp.  Straightness Measurement for Long Movements , 2005 .

[8]  Kuang Cui-fang.  Analyzing characteristic of the cube-corner retroreflector applied to laser straightness measurement , 2005 .

[9]  Qiu Zi-xue.  Automatic measuring system of alignment error based on laser collimator technique , 2006 .

[10]  Masaji Sawabe,et al.  A new vacuum interferometric comparator for calibrating the fine linear encoders and scales , 2004 .

[11]  En Hong,et al.  A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement , 2007 .

[12]  Heui Jae Pahk,et al.  Development of straightness measurement technique using the profile matching method , 1997 .