Anharmonic modal coupling in a bulk micromechanical resonator

We present measurements of nonlinear coupling between various acoustic modes of a micromechanical resonator. Piezoelectric transduction allows measurement of both flexural and bulk longitudinal modes up to microwave frequencies, and we find that all modes of the device couple, regardless of type. This coupling thus provides a means of mechanical nonlinear signal processing across a wide range of frequencies. Through controlled simultaneous excitation, we quantify coupling strength by measuring the frequency shift in a detector mode in response to the known energy of a driven mode.

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