Real-Time Scheduling and Control of Single-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation by Using Resource-Oriented Petri Nets

In semiconductor manufacturing, when a wafer is processed, it requires unloading from its process module in a given time interval, otherwise it is scraped. This requirement is called wafer residency time constraints. Thus, it is crucial to schedule a cluster tool such that the wafer sojourn time in a process module is within a given time window to satisfy the wafer residency time constraints. Besides wafer residency time constraints, in a cluster tool, the activity time is subject to variation. The activity time variation can make a feasible schedule obtained under the assumption of deterministic activity times become infeasible. To solve this problem, it is important to reveal the wafer sojourn time fluctuations with bounded activity time variation. Such an issue is addressed in this chapter for single-arm cluster tools. A single-arm cluster tool is modeled by a resource-oriented Petri net to describe the wafer fabrication processes. Based on it, a real-time control policy is proposed such that it offsets the effect of the activity time variation as much as possible. Then, the wafer sojourn time delay in a process module is analyzed DOI: 10.4018/978-1-4666-4034-4.ch008

[1]  Tae-Eog Lee,et al.  Schedulability Analysis of Time-Constrained Cluster Tools With Bounded Time Variation by an Extended Petri Net , 2008, IEEE Transactions on Automation Science and Engineering.

[2]  Y. Narahari,et al.  Deadlock prevention and deadlock avoidance in flexible manufacturing systems using Petri net models , 1990, IEEE Trans. Robotics Autom..

[3]  S. C. Wood,et al.  Systems of multiple cluster tools: configuration, reliability, and performance , 2003 .

[4]  MengChu Zhou,et al.  Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems , 2001, IEEE Trans. Robotics Autom..

[5]  Sundarapandian Vaidyanathan,et al.  Random Bit Generator Based on Non-Autonomous Chaotic Systems , 2015 .

[6]  R. S. Gyurcsik,et al.  Single-wafer cluster tool performance: an analysis of throughput , 1994 .

[7]  MengChu Zhou,et al.  Parallel and sequential mutual exclusions for petri net modeling of manufacturing systems with shared resources , 1991, IEEE Trans. Robotics Autom..

[8]  Chengbin Chu,et al.  Cyclic scheduling of a hoist with time window constraints , 1998, IEEE Trans. Robotics Autom..

[9]  Naiqi Wu,et al.  Modeling and deadlock control of automated guided vehicle systems , 2004 .

[10]  S. Venkatesh,et al.  A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots , 1997 .

[11]  MengChu Zhou,et al.  Analysis of Wafer Sojourn Time in Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation , 2010, IEEE Transactions on Semiconductor Manufacturing.

[12]  Chengbin Chu,et al.  Multi-degree cyclic scheduling of two robots in a no-wait flowshop , 2005, IEEE Transactions on Automation Science and Engineering.

[13]  MengChu Zhou,et al.  Petri net modeling and real-time control of dual-arm cluster tools with residency time constraint and activity time variations , 2008, 2008 IEEE International Conference on Automation Science and Engineering.

[14]  Ahmad Taher Azar,et al.  Handbook of Research on Advanced Intelligent Control Engineering and Automation , 2015 .

[15]  Chengbin Chu,et al.  Cyclic hoist scheduling in large real-life electroplating lines , 2007, OR Spectr..

[16]  MengChu Zhou,et al.  Deadlock avoidance in semiconductor track systems , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[17]  Feng Chu,et al.  A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints , 2008, IEEE Transactions on Semiconductor Manufacturing.

[18]  Kamel Ben Othman,et al.  Fault Detection and Isolation for an Uncertain Takagi-Sugeno Fuzzy System using the Interval Approach , 2015 .

[19]  Tae-Eog Lee,et al.  An extended event graph with negative places and tokens for time window constraints , 2005, IEEE Transactions on Automation Science and Engineering.

[20]  Zhiwu Li,et al.  Formal Methods in Manufacturing Systems: Recent Advances , 2013 .

[21]  Tae-Eog Lee,et al.  Scheduling analysis of time-constrained dual-armed cluster tools , 2003 .

[22]  MengChu Zhou,et al.  Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation , 2012, IEEE Transactions on Automation Science and Engineering.

[23]  Eugene Levner,et al.  Multiple-part cyclic hoist scheduling using a sieve method , 1999, IEEE Trans. Robotics Autom..

[24]  Saqib Saeed,et al.  CALL FOR CHAPTER PROPOSALS Proposal Submission Deadline: January 30, 2012 Business Strategies and Approaches for Effective Engineering Management , 2012 .

[25]  Jiliang Luo.  Petri Net Supervisory Method for Linear Constraints and its Applications to Flexible Manufacturing Systems , 2013 .

[26]  Wlodzimierz M. Zuberek,et al.  Timed Petri nets in modeling and analysis of cluster tools , 2001, IEEE Trans. Robotics Autom..

[27]  Hyun Joong Yoon,et al.  Online scheduling of integrated single-wafer processing tools with temporal constraints , 2005 .

[28]  Safya Belghith,et al.  Further Investigation of the Period-Three Route to Chaos in the Passive Compass-Gait Biped Model , 2015 .

[29]  MengChu Zhou,et al.  Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach , 1998 .

[30]  NaiQi Wu,et al.  Colored timed Petri nets for modeling and analysis of cluser tools , 2010, Asian Journal of Control.

[31]  Tae-Eog Lee,et al.  Modeling and implementing a real-time scheduler for dual-armed cluster tools , 2001, Comput. Ind..

[32]  Tae-Eog Lee,et al.  Schedule stabilization and robust timing control for time-constrained cluster tools , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[33]  Kamaljeet Sandhu.  Empirical Analysis for E-Services Acceptance Model: Important Findings , 2013 .

[34]  Wai Kin Chan,et al.  Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis , 2011, IEEE Transactions on Automation Science and Engineering.

[35]  Shengwei Ding,et al.  Multicluster tools scheduling: an integrated event graph and network model approach , 2006, IEEE Transactions on Semiconductor Manufacturing.

[36]  MengChu Zhou,et al.  Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation , 2012, IEEE Transactions on Automation Science and Engineering.

[37]  Mingming Yan.  Design of Optimized Petri Net Supervisors for Flexible Manufacture Systems Based on Elementary Siphons , 2013 .

[38]  MuDer Jeng,et al.  Petri net modeling and lagrangian relaxation approach to vehicle scheduling in 300mm semiconductor manufacturing , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[39]  MengChu Zhou,et al.  A hybrid methodology for synthesis of Petri net models for manufacturing systems , 1992, IEEE Trans. Robotics Autom..

[40]  MengChu Zhou,et al.  Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets , 2007, OR Spectr..

[41]  Shengwei Ding,et al.  Steady-State Throughput and Scheduling Analysis of Multicluster Tools: A Decomposition Approach , 2008, IEEE Transactions on Automation Science and Engineering.

[42]  Souad Chebbi,et al.  Analysis of Renewable Energy Power Systems: Reliability and Flexibility during Unbalanced Network Fault , 2015 .

[43]  Babak Hamidzadeh,et al.  An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints , 2001, IEEE Trans. Robotics Autom..

[44]  MengChu Zhou,et al.  Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation , 2012, IEEE Transactions on Semiconductor Manufacturing.

[45]  MengChu Zhou,et al.  A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis , 2010, IEEE Transactions on Automation Science and Engineering.

[46]  Tadao Murata,et al.  Petri nets: Properties, analysis and applications , 1989, Proc. IEEE.

[47]  R. S. Gyurcsik,et al.  Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput , 1996 .