Study of Accelerated Stability Test Method for Quartz Flexible Accelerometer

The manufactured quartz flexible accelerometer has the serious problem of bad parametric repeatability. To solve this issue, this paper does systematic research about the accelerated stability test method to improve the long-term repeatability of the accelerometer from the product hierarchy. Proceeding from the analysis of the accelerometer's internal stress mechanism, it makes a positioning analysis of the causes of bad parametric repeatability and reveals what types of test stress make the accelerometer stable. After the main experimental factors are determined, the scope of these factors' level is obtained through enhancement tests. Based on previous research achievements, an accelerated stability testing scheme is worked out. By the accelerated stability exploratory test in the early period, this paper draws up the effective test method of accelerated stability and achieves the aim of making the accelerometer get into the steady state as soon as possible. This provides initial technical support for the enhancement of the accelerometer's long-term repeatability.

[1]  Wang Cheng.  Study of the identification for the static temperature model and the method for compensating temperature of the accelerometer , 2007 .

[2]  D.W. de Bruin,et al.  Self-testable accelerometer systems , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[3]  Chu We.  Highly Accelerated Life Test(HALT)And Highly Accelerated Stress Screen(HASS) , 2002 .

[4]  Haiying Hou,et al.  Modeling inertial sensors errors using Allan variance , 2004 .

[5]  Makoto Ishida,et al.  A three-axis accelerometer for high temperatures with low temperature dependence using a constant temperature control of SOI piezoresistors , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[6]  Aaas News,et al.  Book Reviews , 1893, Buffalo Medical and Surgical Journal.

[7]  B.Y. Majlis,et al.  Stiffness and Frequency Analysis of Microaccelerometer , 2006, 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium.

[8]  C. Glennie.  An analysis of airborne gravity by strapdown INS/DGPS , 1999 .

[9]  G.K. Fedder,et al.  Temperature control of CMOS micromachined sensors , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[10]  Liu Xiao.  Influence factors and theoretic analysis for model coefficient of accelerometer , 2002 .