论文信息 - Sol–gel prepared MoO3–WO3 thin-films for O2 gas sensing

Sol–gel prepared MoO3–WO3 thin-films for O2 gas sensing

Abstract Oxygen gas sensing properties of molybdenum trioxide and tungsten trioxide (MoO 3 –WO 3 ) mixed metal oxide thin-films are investigated. Various MoO 3 –WO 3 ratio thin-film samples are deposited onto silicon (1 0 0) and sapphire substrates via the sol–gel route. SEM analysis showed the presence of MoO 3 orthorhombic phase, abating as WO 3 dominated the mixed system. MoO 3 –WO 3 sensors exhibited a linear response to O 2 concentrations varying from 10 to 10,000 ppm. The MoO 3 –WO 3 film response was stable and reproducible operating at an optimal temperature of 420°C.

[1] Matteo Ferroni,et al. MoO3-based sputtered thin films for fast NO2 detection , 1998 .

[2] C. Rao,et al. MoO3/TiO2 and Bi2MoO6 as ammonia sensors , 1994 .

[3] Norio Miura,et al. Study of WO3-based sensing materials for NH3 and NO detection , 2000 .

[4] Chao-Nan Xu,et al. Selective detection of NH3 over NO in combustion exhausts by using Au and MoO3 doubly promoted WO3 element , 2000 .

[5] Yuichi Watanabe,et al. Preparation and characterization of an optically detectable H2 gas sensor consisting of Pd/MoO3 thin films , 1993 .

[6] E. Obermeier,et al. Sputtered molybdenum oxide thin films for NH3 detection , 1996 .

[7] Matteo Ferroni,et al. Characterization of a molybdenum oxide sputtered thin film as a gas sensor , 1997 .

[8] Wojtek Wlodarski,et al. Characterization of sol-gel prepared WO3 thin films as a gas sensor , 1999 .

[9] M. A. Daous,et al. Optical properties of thin films of and mixed oxides , 1997 .

[10] S. Akbar,et al. Behavior of a New ZrO2 ‐ MoO3 Sensor for Carbon Monoxide Detection , 1992 .

[11] Giuliano Martinelli,et al. PREPARATION AND CHARACTERIZATION OF SNO2 AND MOOX-SNO2 NANOSIZED POWDERS FOR THICK FILM GAS SENSORS , 1999 .

[12] Giorgio Sberveglieri,et al. WO3 sputtered thin films for NOx monitoring , 1995 .