Laser intensity-based geometry control of periodic submicron polymer structures fabricated by laser interference lithography

Photo-polymerization based fabrication of polymer micro- and nanostructures allows flexible geometry control due to reaction kinetics that are strongly dependent on the characteristics of exposure energy. Herein, we demonstrate the geometry control of the submicron polymer structures by altering the polymerization kinetics with variations of laser pulse duration and peak intensity, simultaneously. Periodic surface structures with submicron features having Gaussian and circle function profiles, as well as unique, dimple-like, geometry nanostructures were fabricated. The demonstrated fabrication method could be applied for the development of diffraction-based optical elements and anti-reflective surfaces, or the modulation of surface wetting and tribological properties.

[1]  Qiangfei Xia,et al.  Applications of excimer laser in nanofabrication , 2009 .

[2]  Karl Leo,et al.  Efficiency Enhancement of Organic Solar Cells by Fabricating Periodic Surface Textures using Direct Laser Interference Patterning , 2012, Advanced materials.

[3]  Pantazis Mouroulis,et al.  Diffusion Model of Hologram Formation in Dry Photopolymer Materials , 1994 .

[4]  M. Malinauskas,et al.  Holographic lithography for biomedical applications , 2012, Photonics Europe.

[5]  M. Gedvilas,et al.  Picosecond-Laser 4-Beam-Interference Ablation as a Flexible Tool for Thin Film Microstructuring , 2011 .

[6]  Ping-Hei Chen,et al.  Study on wetting properties of periodical nanopatterns by a combinative technique of photolithography and laser interference lithography , 2010 .

[7]  Christophe Vieu,et al.  Electron beam lithography: resolution limits and applications , 2000 .

[8]  M. Malinauskas,et al.  Laser two-photon polymerization micro- and nanostructuring over a large area on various substrates , 2010, Photonics Europe.

[9]  Theresa S. Mayer,et al.  Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography , 2003 .

[10]  Cheng Xian-zhong,et al.  Fabrication of Nanoimprint Stamp Using Interference Lithography , 2007 .

[11]  M. Gedvilas,et al.  Fabrication of periodic micro-structures by holographic lithography , 2013 .

[12]  Jung Ho Park,et al.  Nanopatterning by laser interference lithography: applications to optical devices. , 2014, Journal of nanoscience and nanotechnology.

[13]  R. Larson,et al.  QUANTITATIVE MODEL OF VOLUME HOLOGRAM FORMATION IN PHOTOPOLYMERS , 1997 .

[14]  Gerd Marowsky,et al.  Ablation dynamics of periodic nanostructures for polymer-based all-optical devices , 2002 .

[15]  Seeram Ramakrishna,et al.  Anti-reflective coatings: A critical, in-depth review , 2011 .

[16]  C. Fotakis,et al.  Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication. , 2008, ACS nano.

[17]  Carsten Maple,et al.  Effects of polarization on four-beam laser interference lithography , 2013 .

[18]  Richard S. Stein,et al.  Holographic Data Storage in Amorphous Polymers , 1998 .

[19]  M. Malinauskas,et al.  Applications of nonlinear laser nano/microlithography: fabrication from nanophotonic to biomedical components , 2011, Other Conferences.

[20]  A. A. Friesem,et al.  Towards ultranarrow bandwidth polymer-based resonant grating waveguide structures , 2004 .

[21]  E. Yoon,et al.  Capillarity-assisted fabrication of nanostructures using a less permeable mold for nanotribological applications , 2006 .

[22]  L. J. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[23]  Mangirdas Malinauskas,et al.  Fabrication of Scaffolds and Micro-Lenses Array in a Negative Photopolymer SZ2080 by Multi-Photon Polymerization and Four-Femtosecond-Beam Interference , 2011 .

[24]  U. Bakowsky,et al.  Laser ablation patterning by interference induces directional cell growth , 2003, IEEE Transactions on NanoBioscience.

[25]  Riemann–Liouville and Weyl fractional oscillator processes , 2006 .

[26]  Z. Fan,et al.  Electrical Property of ZnO Nanowire Field-Effect Transistor Characterized with a Scanning Probe , 2005 .

[27]  K. Loeschner,et al.  Self-organized, gratinglike nanostructures in polymer films with embedded metal nanoparticles induced by femtosecond laser irradiation , 2010 .

[28]  J. Baglin,et al.  Ion beam nanoscale fabrication and lithography—A review , 2012 .

[29]  Costas Fotakis,et al.  Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials. , 2009, Optics express.

[30]  Hanqing Jiang,et al.  Facile large-area photolithography of periodic sub-micron structures using a self-formed polymer mask , 2012 .

[31]  Michael R. Gleeson,et al.  High Intensity Response of Photopolymer Materials for Holographic Grating Formation , 2010 .

[32]  C. Ting,et al.  Subwavelength structures for broadband antireflection application , 2009 .

[33]  Evaldas Stankevičius,et al.  Bessel-like beam array formation by periodical arrangement of the polymeric round-tip microstructures. , 2015, Optics express.

[34]  I. Lin,et al.  Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies , 2006 .