On electrostatic actuation beyond snapping condition
暂无分享,去创建一个
[1] Andrei M. Shkel,et al. Active structural error suppression in MEMS vibratory rate integrating gyroscopes , 2003 .
[2] G. K. Ananthasuresh,et al. PULL-IN DYNAMICS OF ELECTROSTATICALLY-ACTUATED BEAMS , 1996 .
[3] S. Senturia,et al. Pull-in time dynamics as a measure of absolute pressure , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[4] Bernhard E. Boser,et al. Parallel-Plate Driven Oscillations and Resonant Pull-In , 2002 .