Multilayer Laue Lens: A Brief History and Current Status

X-rays are intrinsically capable of being used for the study of non-periodic objects with atomic resolution, with high penetration, in applied electromagnetic fields, and in fluids and gases. For direct imaging via nanofocused X-ray beams, reflective [1], refractive [2], and diffractive [3, 4] optics are used in various approaches for high-resolution imaging. Diffractive X-ray optics are endowed with the highest numerical aperture, in principle allowing focusing of X-rays to sub-nanometer dimensions. Lithographically produced Fresnel zone plates (FZP) find broad deployment around the globe, in both nanofocusing and full-field imaging approaches, and have, for many years, been workhorse optics in both synchrotron-based and laboratory-based X-ray imaging systems [4]. A FZP consists of a series of radially symmetric rings, which are known as Fresnel zones, which alternate between transparent and opaque. Radiation traversing into the FZP diffracts around the opaque zones, which are placed in an arrangement where light constructively interferes at the focal plane.

[1]  Jungdae Kim,et al.  Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope. , 2013, The Review of scientific instruments.

[2]  Jörg Maser,et al.  Quantitative x-ray phase imaging at the nanoscale by multilayer Laue lenses , 2013, Scientific Reports.

[3]  Anton Barty,et al.  High numerical aperture multilayer Laue lenses , 2015, Scientific Reports.

[4]  Henry N. Chapman,et al.  Fabrication of wedged multilayer Laue lenses , 2015 .

[5]  Jörg Maser,et al.  Wedged multilayer Laue lens. , 2008, The Review of scientific instruments.

[6]  S Kalbfleisch,et al.  Pushing the limits: an instrument for hard X-ray imaging below 20 nm. , 2015, Journal of synchrotron radiation.

[7]  Hua Zhou,et al.  Pressure-dependent Transition from Atoms to Nanoparticles in Magnetron Sputtering: Effect on WSi2 Film Roughness and Stress , 2010, 1005.2708.

[8]  T Salditt,et al.  Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate. , 2013, Optics express.

[9]  Jörg Maser,et al.  Oxidation of PtNi nanoparticles studied by a scanning X-ray fluorescence microscope with multi-layer Laue lenses. , 2013, Nanoscale.

[10]  H. Takano,et al.  Circular multilayer zone plate for high-energy x-ray nano-imaging. , 2012, The Review of scientific instruments.

[11]  Li Li,et al.  Multimodality hard-x-ray imaging of a chromosome with nanoscale spatial resolution , 2016, Scientific Reports.

[12]  Christian G. Schroer,et al.  Multilayer Laue Lenses with Focal Length of 10 mm , 2013 .

[13]  J. Kirz,et al.  Soft X-ray microscopes and their biological applications , 1995, Quarterly Reviews of Biophysics.

[14]  A. Macrander,et al.  Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging , 2010 .

[15]  E. Zschech,et al.  Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer , 2014 .

[16]  Peng Liu,et al.  A compound multilayer Laue lens with multiple tilting angles , 2016 .

[17]  H. C. Kang,et al.  Nanometer linear focusing of hard x rays by a multilayer Laue lens. , 2006, Physical review letters.

[18]  S. Rehbein,et al.  Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39nm structures. , 2011, Ultramicroscopy.

[19]  V. Altuzar,et al.  Atmospheric pollution profiles in Mexico City in two different seasons , 2003 .

[20]  P. Thibault,et al.  Transmission and emission x-ray microscopy: operation modes, contrast mechanisms and applications , 2011, Journal of physics. Condensed matter : an Institute of Physics journal.

[21]  Hanfei Yan,et al.  Bonded Multilayer Laue Lens for focusing hard X-rays , 2007 .

[22]  Elina Färm,et al.  Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime. , 2011, Optics express.

[23]  Wah-Keat Lee,et al.  Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm. , 2011, Optics express.

[24]  K. Kohra,et al.  Fabrication and Characterization of Multilayer Zone Plate for Hard X-Rays , 1988 .

[25]  R. Bionta.  Transmission gratings that diffract 8 keV x rays , 1987 .

[26]  M. Burghammer,et al.  Hard x-ray nanoprobe based on refractive x-ray lenses , 2005 .

[27]  Li Li,et al.  11 nm hard X-ray focus from a large-aperture multilayer Laue lens , 2013, Scientific Reports.

[28]  A. Macrander,et al.  Depth-graded multilayers for application in transmission geometry as linear zone plates , 2005 .

[29]  T. Liese,et al.  Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam. , 2010, The Review of scientific instruments.

[30]  Chian Liu,et al.  Multilayer Laue lenses as high-resolution x-ray optics , 2004, SPIE Optics + Photonics.

[31]  T. Ishikawa,et al.  Single-nanometer focusing of hard x-rays by Kirkpatrick–Baez mirrors , 2011, Journal of physics. Condensed matter : an Institute of Physics journal.

[32]  Jörg Maser,et al.  Efficiency of a multilayer-Laue-lens with a 102 μm aperture , 2015 .

[33]  H. Chapman,et al.  High-efficiency diffractive x-ray optics from sectioned multilayers , 2005 .

[34]  Giorgio Margaritondo,et al.  Hard-X-ray Zone Plates: Recent Progress , 2012, Materials.

[35]  Anatoly Snigirev,et al.  Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling , 2013, Journal of synchrotron radiation.

[36]  Ian Lewis,et al.  Proceedings of the SPIE , 2012 .

[37]  Nathalie Bouet,et al.  Hard x-ray nanofocusing by multilayer Laue lenses , 2014 .

[38]  Jörg Maser,et al.  Diffraction properties of multilayer Laue lenses with an aperture of 102 µm and WSi₂/Al bilayers. , 2015, Optics express.

[39]  Q. Shen,et al.  Takagi-taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture. , 2007, 0704.3982.

[40]  Bing Shi,et al.  Periodic variation of stress in sputter deposited Si/WSi2 multilayers , 2011, 1106.2154.

[41]  Christian G. Schroer,et al.  Full-field X-ray microscopy with crossed partial multilayer Laue lenses. , 2014, Optics express.

[42]  Jörg Maser,et al.  Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens , 2008 .

[43]  T. Liese,et al.  Development of laser deposited multilayer zone plate structures for soft X-ray radiation , 2011 .

[44]  Jörg Maser,et al.  Sectioning of multilayers to make a multilayer Laue lens. , 2007, The Review of scientific instruments.

[45]  Jörg Maser,et al.  Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses. , 2011, Optics express.

[46]  R. Bionta,et al.  Hard x‐ray sputtered‐sliced phase zone plates , 1994 .