Batch fabricated dual cantilever resistive probe for scanning thermal microscopy

In this study dual cantilever resistive probes for scanning thermal microscopy (SThM) have been batch fabricated. In the dual probe, one is used as local heater and a second one nearby detects the thermal diffusivity at a microscopic scale. Various types of dual probes have been fabricated in one batch to allow experimental determination of the optimal sensor type for the measurement. Thermal scans with the dual cantilever probes have been performed in atmosphere, and contrast in thermal imaging indicating the difference of thermal conductivity is shown. Test of these probes under vacuum indicates strong thermal coupling through air between the two probes in the dual cantilever probes.

[1]  L. Balk,et al.  Quantitative thermal conductivity measurements with nanometre resolution , 1999 .

[2]  E. Oesterschulze,et al.  Photo-thermal characterization of solids and thin films by optical and scanning probe techniques , 1993 .

[3]  N. Trannoy,et al.  Thermal conductivity calibration for hot wire based dc scanning thermal microscopy , 2003 .

[4]  H. Fischer,et al.  Quantitative determination of heat conductivities by scanning thermal microscopy , 2005 .

[5]  S. Volz,et al.  3ω-scanning thermal microscope , 2005 .

[6]  Fred H. Pollak,et al.  Determination of the thermal conductivity of diamond-like nanocomposite films using a scanning thermal microscope , 1998 .

[7]  Vladimir Lysenko,et al.  Application of scanning thermal microscopy for thermal conductivity measurements on meso-porous silicon thin films , 2007 .

[8]  B. Wunderlich,et al.  Application of a Wollaston wire probe for quantitative thermal analysis , 2002 .

[9]  H. K. Wickramasinghe,et al.  Scanning thermal profiler , 1986 .

[10]  A. Majumdar.  SCANNING THERMAL MICROSCOPY , 1999, Annual Review of Materials Science.

[11]  B. Gotsmann,et al.  High resolution vacuum scanning thermal microscopy of HfO2 and SiO2 , 2008 .

[12]  John M. R. Weaver,et al.  Scanning thermal microscopy using batch fabricated thermocouple probes , 1998 .

[13]  Chunhai. Wang.  The principle of micro thermal analysis using atomic force microscope , 2004 .

[14]  L. Balk,et al.  Quantitative dynamic near-field microscopy of thermal conductivity , 2004 .

[15]  Arun Majumdar,et al.  Thermal imaging by atomic force microscopy using thermocouple cantilever probes , 1995 .

[16]  T. L. Wright,et al.  Thermal conduction from microcantilever heaters in partial vacuum , 2007 .

[17]  Young Ki Choi,et al.  Quantitative scanning thermal microscopy using double scan technique , 2008 .