Electrically injected GeSn lasers with peak wavelength up to 2.7 micrometer at 90 K

GeSn lasers enable monolithic integration of lasers on the Si platform using all-group-IV direct-bandgap materials. Although optically pumped GeSn lasers have made significant progress, the study of the electrically injected lasers has just begun only recently. In this work, we present explorative investigations of electrically injected GeSn heterostructure lasers with various layer thicknesses and material compositions. The cap layer total thickness was varied between 240 and 100 nm. At 10 K, a 240-nm-SiGeSn capped device had a threshold current density Jth = 0.6 kA/cm2 compared to Jth = 1.4 kA/cm2 of a device with 100-nm-SiGeSn cap due to an improved modal overlap with the GeSn gain region. Both devices had a maximum operating temperature Tmax = 100 K. Device with cap layers of Si0.03Ge0.89Sn0.08 and Ge0.95Sn0.05, respectively, were also compared. Due to less effective carrier (electron) confinement, the device with a 240-nm-GeSn cap had a higher threshold Jth = 2.4 kA/cm2 and lower maximum operating temperature Tmax = 90 K, compared to those of the 240-nm-SiGeSn capped device with Jth = 0.6 kA/cm2 and Tmax = 100 K. In the study of the active region material, the device with Ge0.85Sn0.15 active region had a 2.3 times higher Jth and 10 K lower Tmax, compared to the device with Ge0.89Sn0.11 in its active region. This is likely due to higher defect density in Ge0.85Sn0.15 rather than an intrinsic issue. The longest lasing wavelength was measured as 2682 nm at 90 K. The investigations provide guidance to the future structure design of GeSn laser diodes to further improve the performance.

[1]  R. Soref,et al.  Electrically injected GeSn lasers on Si operating up to 100  K , 2020, 2004.09402.

[2]  I. Sagnes,et al.  Ultra-low threshold cw and pulsed lasing in tensile strained GeSn alloys , 2020, 2001.04927.

[3]  J. Margetis,et al.  Study of Si-Based GeSn Optically Pumped Lasers With Micro-Disk and Ridge Waveguide Structures , 2019, Front. Phys..

[4]  J. Faist,et al.  GeSn Lasers Covering a Wide Wavelength Range Thanks to Uniaxial Tensile Strain , 2019, ACS Photonics.

[5]  J. Hartmann,et al.  Mid-Infrared GeSn-Based LEDs with Sn Content up to 16% , 2019, International Conference on Group IV Photonics.

[6]  G. Salamo,et al.  Photovoltage spectroscopy of direct and indirect bandgaps of strained Ge1-Sn thin films on a Ge/Si(001) substrate , 2019, Acta Materialia.

[7]  Wei Du,et al.  Optically Pumped GeSn Lasers Operating at 270 K with Broad Waveguide Structures on Si , 2019, ACS Photonics.

[8]  J. Hartmann,et al.  GeSn heterostructure micro-disk laser operating at 230 K. , 2018, Optics express.

[9]  R. Soref,et al.  All group-IV SiGeSn/GeSn/SiGeSn QW laser on Si operating up to 90 K , 2018, Applied Physics Letters.

[10]  G. Capellini,et al.  GeSn/SiGeSn Heterostructure and Multi Quantum Well Lasers , 2018, ACS Photonics.

[11]  Jifeng Liu,et al.  Emerging technologies in Si active photonics , 2018, Journal of Semiconductors.

[12]  Wei Du,et al.  Si-Based GeSn Lasers with Wavelength Coverage of 2–3 μm and Operating Temperatures up to 180 K , 2017 .

[13]  R. Soref,et al.  Systematic study of GeSn heterostructure-based light-emitting diodes towards mid-infrared applications , 2016 .

[14]  C. Schulte-Braucks,et al.  Optically Pumped GeSn Microdisk Lasers on Si , 2016 .

[15]  Wei Du,et al.  Systematic study of Ge1−xSnx absorption coefficient and refractive index for the device applications of Si-based optoelectronics , 2016 .

[16]  J. Faist,et al.  Lasing in direct-bandgap GeSn alloy grown on Si , 2015, Nature Photonics.

[17]  R. Soref Mid-infrared photonics in silicon and germanium , 2010 .

[18]  S. Chuang,et al.  Theory for n-type doped, tensile-strained Ge-Si(x)Ge(y)Sn1-x-y quantum-well lasers at telecom wavelength. , 2009, Optics express.

[19]  Shun Lien Chuang,et al.  Physics of Photonic Devices , 2009 .

[20]  J. Bouley,et al.  Growth and properties of GaAsSb/GaAIAsSb double heterostructure lasers , 1979 .

[21]  Richard A. Soref,et al.  Group IV Photonics: Driving Integrated Optoelectronics , 2016 .