Design of broadband and broad angular Cr/C multilayer reflector for “near water window” region
暂无分享,去创建一个
[1] Franz Schäfers,et al. Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet , 2007 .
[2] Franz Schäfers,et al. Short communication Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range , 2006 .
[3] A. K. Powell,et al. Broad angular multilayer analyzer for soft X-rays. , 2006, Optics express.
[4] Hans Willy Becker,et al. High-performance 6-inch EUV mask blanks produced under real production conditions by ion-beam sputter deposition , 2002, Photomask Technology.
[5] Hans Willy Becker,et al. Ion beam sputter deposition of low-defect EUV mask blanks on 6-in. LTEM substrates in a real production environment , 2002, SPIE Advanced Lithography.
[6] F. Schäfers. Multilayers for the EUV/soft X-ray range , 2000 .
[7] Zhanshan Wang,et al. Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions , 2000 .
[8] H. Nagata,et al. Schwarzschild microscope for carbon Kα radiation. , 1993, Applied optics.
[9] R. H. Stulen,et al. Diffraction-limited soft-x-ray projection imaging using a laser plasma source. , 1991, Optics letters.
[10] Nilsen. Ni-like x-ray lasers resonantly photopumped by Ly- alpha radiation. , 1991, Physical Review Letters.
[11] N. Ceglio,et al. Thermally induced structural modification of Mo‐Si multilayers , 1990 .
[12] R. Sinclair,et al. Interfacial reactions on annealing molybdenum‐silicon multilayers , 1989 .
[13] N. Ceglio,et al. High‐resolution electron microscopy study of x‐ray multilayer structures , 1987 .
[14] L. G. Parratt. Surface Studies of Solids by Total Reflection of X-Rays , 1954 .