We will report on the current status and development of deep ultraviolet light emitting diodes (DUV LEDs). Deep UV LEDs (λ ≤ 365 nm) have many applications in germicidal sterilization and disinfection, biomedical instrumentation, bio-agent detection, analytical instrumentation, and industrial curing. Commercially available LEDs are now exceeding 1% wall plug efficiency with up to 2% wall plug efficiency demonstrated for 280 nm LEDs. Advancements in the structural and electrical quality of AlInGaN materials will be discussed with their effect on device performance.