Nonlinear image self-filtering with liquid crystal spatial light modulator

Nonlinear spatial filtering is realized due to the electro-optical effect in spatial light modulators (SLMs). Optical methods with nonlinear filtering are suggested for various optical applications such as optical inspection of photolithography masks, wavefront sensor, etc. A fast optical response of the SLM allows optical inspection with a video (or faster) rate. The optical system proposed is tolerant to the vibrations and temperature variations because of the dynamic properties of the SLM.