Process yield analysis for multivariate linear profiles

Abstract Process capability analysis plays an important role in statistical quality control. We present the process yield index TSpkA to evaluate the process yield for multivariate linear profiles in manufacturing processes. This index provides an exact measure of the process yield. In addition, an approximate confidence interval for TSpkA is constructed. A simulation study is conducted to assess the performance of the proposed method for multivariate linear profiles data under mutually independent normality and multivariate normality. The simulation results confirm that the estimated TSpkA is close to the target value with smaller standard deviation as the sample size increases.

[1]  Babak Abbasi,et al.  Evaluation of process capability indices of linear profiles , 2012 .

[2]  R. Noorossana,et al.  Phase II Monitoring of Autocorrelated Polynomial Pro les in AR(1) Processes , 2010 .

[3]  Rassoul Noorossana,et al.  Statistical Analysis of Profile Monitoring , 2011 .

[4]  Fu-Kwun Wang,et al.  Process Yield for a Manufactured Product , 2013 .

[5]  Rassoul Noorossana,et al.  Phase II monitoring of multivariate simple linear profiles , 2010, Comput. Ind. Eng..

[6]  Rassoul Noorossana,et al.  Phase II monitoring of multivariate multiple linear regression profiles , 2011, Qual. Reliab. Eng. Int..

[7]  T. Du,et al.  Using principal component analysis in process performance for multivariate data , 2000 .

[8]  Michael H. Kutner Applied Linear Statistical Models , 1974 .

[9]  Wen Lea Pearn,et al.  Capability measures for processes with multiple characteristics , 2003 .

[10]  Wen Lea Pearn,et al.  On the distribution of the estimated process yield index Spk , 2002 .

[11]  Rassoul Noorossana,et al.  On the Monitoring of Autocorrelated Linear Profiles , 2008 .

[12]  W.L. Pearn,et al.  Photolithography Control in Wafer Fabrication Based on Process Capability Indices With Multiple Characteristics , 2009, IEEE Transactions on Semiconductor Manufacturing.

[13]  Seyedeh Zahra Hosseinifard,et al.  Process Capability Analysis in Non Normal Linear Regression Profiles , 2012, Commun. Stat. Simul. Comput..

[14]  Mahmoud A. Mahmoud,et al.  Statistical monitoring of multivariate multiple linear regression profiles in phase I with calibration application , 2010, Qual. Reliab. Eng. Int..

[15]  F. K. Wang Quality Evaluation of a Manufactured Product with Multiple Characteristics , 2006, Qual. Reliab. Eng. Int..

[16]  Samuel Kotz,et al.  Process Capability Indices—A Review, 1992–2000 , 2002 .

[17]  E Memarzadeh Lotfabad,et al.  STRUCTURAL AND MAGNETIC STUDY OF ACTIVE SCREEN PLASMA NITRIDED FE73:5SI13:5B9NB3CU1 AND FE77SI11B9NB2:4CU0:6RIBBONS , 2010 .

[18]  R. A. Boyles Brocess capability with asymmetric tolerances , 1994 .

[19]  V. Barnett,et al.  Applied Linear Statistical Models , 1975 .

[20]  Bong-Jin Yum,et al.  A bibliography of the literature on process capability indices: 2000–2009 , 2011, Qual. Reliab. Eng. Int..

[21]  Hamid Shahriari,et al.  A process capability index for simple linear profile , 2013 .

[22]  Fu-Kwun Wang,et al.  Measuring production yield for processes with multiple quality characteristics , 2006 .

[23]  Amirhossein Amiri,et al.  Monitoring Correlated Profile and Multivariate Quality Characteristics , 2014, Qual. Reliab. Eng. Int..

[24]  William H. Woodall,et al.  Current research on profile monitoring , 2007 .

[25]  H Razavi,et al.  DETERMINATION OF PROCESS CAPABILITY INDICES FOR THE SLOPE PARAMETER OF A SINGLE VARIABLE LINEAR PROFILE , 2010 .

[26]  Samuel Kotz,et al.  An overview of theory and practice on process capability indices for quality assurance , 2009 .

[27]  Amirhossein Amiri,et al.  Evaluation of process capability in multivariate simple linear profiles , 2012 .

[28]  Rassoul Noorossana,et al.  Multivariate Linear Profiles Monitoring , 2011 .

[29]  Lan Kang,et al.  On-Line Monitoring When the Process Yields a Linear Profile , 2000 .

[30]  Fugee Tsung,et al.  LASSO-based multivariate linear profile monitoring , 2012, Ann. Oper. Res..

[31]  Fu-Kwun Wang,et al.  Comparison of Three Multivariate Process Capability Indices , 2000 .

[32]  Hamid Shahriari,et al.  A New Multivariate Process Capability Vector , 2009 .

[33]  R Core Team,et al.  R: A language and environment for statistical computing. , 2014 .

[34]  Fred A. Spiring,et al.  A multivariate measure of process capability , 1991 .

[35]  Rassoul Noorossana,et al.  Simple linear profiles monitoring in the presence of within profile autocorrelation , 2009, Comput. Ind. Eng..

[36]  Fu-Kwun Wang,et al.  A General Procedure for Process Yield With Multiple Characteristics , 2010, IEEE Transactions on Semiconductor Manufacturing.

[37]  James W. Liddy,et al.  A note on multivariate capability indices , 1993 .