Symmetric toggle switch—a new type of rf MEMS switch for telecommunication applications: Design and fabrication

Abstract In this paper, we present a new type of rf MEMS switch with low actuation voltage and high isolation, for high rf power and reliability applications in telecommunication. ‘Symmetric toggle switch’ (STS) is based on push–pull mechanism and utilizes torsion springs and levers, placed symmetrically and transverse to CPW line. The switches designed for 8–14 GHz applications have analytically calculated and FEM simulated actuation voltages in the range of 8–10 V. The simulated insertion loss and isolation for the devices are 0.25 and 35 dB, respectively, at 10 GHz. The fabrication process and preliminary experimental results are also presented.