Contouring performance-oriented cross-coupled desired compensation adaptive robust control for a flexure-based stage

This paper develops a practically effective contouring control strategy for a flexure-based parallel micro-motion stage to achieve excellent high-speed contouring performance. Such flexure-based micro-motion systems used in many industrial applications usually have the problems of dynamical nonlinearity, model uncertainty and disturbance, especially under high-speed contouring tasks, which will greatly degrade the system performance unless eliminated. Here we propose cross-coupled desired compensation adaptive robust control (CDCARC) for flexure-based micro-motion systems to achieve high-precision and high-speed contouring performance. In particular, the proposed controller includes a desired compensation adaptive robust controller (DCARC) for dealing with the model uncertainty and uncertain disturbance and a cross-coupled controller (CCC) for improvement of contour accuracy. Thus, the whole control scheme can greatly improve the contour accuracy of the micro-motion stage. Representative experiments are performed on the micro-motion stage and the experimental results prove the ability of the proposed control method to achieve great contouring performance.