Influence of annealing on the properties of ZnO:Ga films prepared by radio frequency magnetron sputtering

[1]  Elvira Fortunato,et al.  Influence of the deposition pressure on the properties of transparent and conductive ZnO: Ga thin-film produced by r.f. sputtering at room temperature , 2003 .

[2]  T. Miyata,et al.  High rate deposition of transparent conducting oxide thin films by vacuum arc plasma evaporation , 2002 .

[3]  K. Cheong,et al.  Electrical and optical studies of ZnO:Ga thin films fabricated via the sol-gel technique , 2002 .

[4]  S. Aly,et al.  Effect of annealing on the optical properties of thermally evaporated ZnO films , 2001 .

[5]  A. Krasnov.  Selection of dielectrics for alternating-current thin-film electroluminescent device , 1999 .

[6]  M. Chudzik,et al.  Charge transport, optical transparency, microstructure, and processing relationships in transparent conductive indium-zinc oxide films grown by low-pressure metal-organic chemical vapor deposition , 1998 .

[7]  J. McKittrick,et al.  Synthesis and optelectronic characterization of gallium doped zinc oxide transparent electrodes , 1996 .

[8]  D. Zhang,et al.  Electrical and optical properties of F-doped textured SnO2 films deposited by APCVD , 1996 .

[9]  H. Ma,et al.  Scattering mechanisms of charge carriers in transparent conducting oxide films , 1996 .

[10]  Enn Mellikov,et al.  Zinc oxide thin films by the spray pyrolysis method , 1995 .

[11]  D. Zhang,et al.  Preparation and properties of transparent conducting indium tin oxide films deposited by reactive evaporation , 1995 .

[12]  B. Ataev,et al.  Highly conductive and transparent Ga-doped epitaxial ZnO films on sapphire by CVD , 1995 .

[13]  B. Chiou,et al.  Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing , 1994 .

[14]  R. Gordon,et al.  Atmospheric pressure chemical vapor deposition of gallium doped zinc oxide thin films from diethyl zinc, water, and triethyl gallium , 1992 .

[15]  K. Yoon,et al.  Optical and electrical properties of Ga2O3-doped ZnO films prepared by r.f. sputtering , 1990 .

[16]  K. L. Chopra,et al.  Indium-doped zinc oxide films as transparent electrodes for solar cells , 1988 .

[17]  Shinzo Takata,et al.  Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering , 1985 .

[18]  K. Chopra,et al.  Transparent conductors—A status review , 1983 .