论文信息 - Role of oxygen on the electrical activation of B in Ge by excimer laser annealing - 字舞流文

Role of oxygen on the electrical activation of B in Ge by excimer laser annealing

G. Fortunato | F. Priolo | M. Cuscunà | R. Milazzo | A. La Magna | E. Napolitani | G. Impellizzeri | S. Boninelli | V. Privitera | G. Fisicaro