论文信息 - Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering - 字舞流文

Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering

M. J. Kim | Sungpil Yoon | D. Yoon | Y. T. Kim | Sungpil Yoon | H. K. Kim | H. M. Lee | D. H. Yoon | H. K. Kim

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