论文信息 - Impact of NiPt Thickness Scaling on Contact Resistance From Thin-Body FD SOI to Trigate FETs - 字舞流文

Impact of NiPt Thickness Scaling on Contact Resistance From Thin-Body FD SOI to Trigate FETs

S. Gausepohl | P. Kirsch | K. Akarvardar | R. Jammy | I. Ok | M. Rodgers | C. Hobbs | K. Ang | V. Kaushik | C. Johnson | H. Chong