Silicon and porous silicon mid-infrared photonic crystals

A 3D silicon micromachining method based on proton beam writing combined with electrochemical anodization of p-type silicon enables fabrication of mid-infrared photonic crystals made of silicon and porous silicon. Here, example structures of silicon 1D and 2D photonic crystals are demonstrated. Progress and problems of fabricating 3D photonic crystals made of silicon are discussed. The strategy of fabricating photonic crystals purely made of porous silicon, and the characterization method of all these mid-infrared structures, are discussed. Due to the flexibility of this fabrication method, photonic devices and integrated photonic circuits may be built on a single chip, for which two 2D silicon photonic crystals with one on top of the other are demonstrated.

[1]  Agnieszka Banas,et al.  Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method , 2012, Nanoscale Research Letters.

[2]  Volker Lehmann,et al.  Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications , 2002 .

[3]  Kevin M. Knowles.  Materials Analysis using a Nuclear Microprobe , 1998 .

[4]  Kurt Busch,et al.  Tunable two-dimensional photonic crystals using liquid crystal infiltration , 2000 .

[5]  Michael J Sailor,et al.  Biodegradable luminescent porous silicon nanoparticles for in vivo applications. , 2009, Nature materials.

[6]  Andrew A. Bettiol,et al.  Three-dimensional microfabrication in bulk silicon using high-energy protons , 2004 .

[7]  J. Ziegler,et al.  SRIM – The stopping and range of ions in matter (2010) , 2010 .

[8]  Andrew A. Bettiol,et al.  Hole transport through proton-irradiated p-type silicon wafers during electrochemical anodization , 2006 .

[9]  Jacopo Forneris,et al.  On the formation of silicon wires produced by high-energy ion irradiation , 2013 .

[10]  Jacopo Forneris,et al.  Defect enhanced funneling of diffusion current in silicon , 2013 .

[11]  Andrew A. Bettiol,et al.  Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation , 2011 .

[12]  M. Notomi,et al.  Waveguides, resonators and their coupled elements in photonic crystal slabs. , 2004, Optics express.

[13]  Christelle Monat,et al.  Integrated optofluidics: A new river of light , 2007 .

[14]  Thomas F. Krauss,et al.  Two-dimensional photonic-bandgap structures operating at near-infrared wavelengths , 1996, Nature.

[15]  M. Wegener,et al.  Fabrication of Silicon Inverse Woodpile Photonic Crystals , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[16]  M. Breese,et al.  Porous silicon Bragg reflectors with sub-micrometer lateral dimensions. , 2007, Optics express.

[17]  Sven Matthias,et al.  Characterization of simple cubic 3D photonic crystals with complete photonic bandgaps , 2005, SPIE OPTO.

[18]  E. Yablonovitch,et al.  Inhibited spontaneous emission in solid-state physics and electronics. , 1987, Physical review letters.

[19]  Volker Lehmann,et al.  Electrochemistry of Silicon , 2002 .

[20]  Vicente Torres-Costa,et al.  Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon , 2012, Nanoscale Research Letters.